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| AP Suite 6.3 | 902 | Other processes | Katarina Logg | A | Computer | Computer |
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| AP Suite 6.3 (2nd) and SurfaceLab | 903 | Other processes | Katarina Logg | A | Computer | Computer |
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| Atom Probe - Cameca LEAP 6000 XR | 306 | Mass spectrometry | Katarina Logg | N | Cameca/Ametek | LEAP 6000 XR |
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| BIB - Leica TIC3X | 405 | Ion milling | Stefan Gustafsson | E | Leica | TIC3X |
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| Elemental Analyser - Elementar vario Micro cube | 502 | Chemical Analysis | Stefan Gustafsson | A | Elementar | vario Micro cube "Academia" |
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| FIB - FEI Versa3D | 404 | Ion milling | Ludvig de Knoop | J | FEI | Versa 3D LoVac |
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| FIB - Tescan GAIA3 | 406 | Ion milling | Stefan Gustafsson | J | Tescan | GAIA3 |
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| FTIR microscope/spectrometer - Bruker Hyperion3000/Vertex70v | 702 | Spectrum Analyzer | Katarina Logg | C | Bruker | Hyperion3000/Vertex70v |
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| Ion Miller - Fischione 1010 | 403 | Ion milling | Ludvig de Knoop | A | Fischione | 1010 IonMill HighMag |
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| IVAS 3.6 | 901 | Other processes | Katarina Logg | A | Computer | Computer |
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| PIPS - Gatan 690 | 402 | Ion milling | Stefan Gustafsson | A | Gatan | 690 PIPS |
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| Plasma Cleaner - Fischione 1020 | 501 | Dry etching | Ludvig de Knoop | A | Fischione | 1020 Plasma Cleaner |
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| Raman microscope - WITec alpha300 R | 701 | Spectrum Analyzer | Katarina Logg | C | WITec | alpha300 R |
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| Sample Preparation - Leica EM TXP | 802 | Sample prep | Stefan Gustafsson | A | Leica | EM TXP |
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| Saw - BUEHLER Low Speed Saw | 801 | Sawing | Stefan Gustafsson | A | BUEHLER | 11-1280-250 |
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| SAXS - SAXSLAB Mat:Nordic | 302 | Other processes | Michal Strach | F | SAXSLAB / Xenocs | Mat:Nordic |
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| SCXRD - Rigaku Synergy R | 305 | X-ray techniques | Michal Strach | G | Rigaku | XtaLAB Synergy-R |
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| SEM - FEI Quanta 200 FEG ESEM | 101 | Surface analysis & TEM | Stefan Gustafsson | H | FEI | Quanta 200 FEG ESEM |
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| SEM - JEOL 7800F Prime | 103 | Surface analysis & TEM | Stefan Gustafsson | H | JEOL | JSM 7800F Prime |
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| SEM - Zeiss Ultra 55 FEG | 102 | Surface analysis & TEM | Ludvig de Knoop | H | Zeiss | Ultra 55 FEG SEM |
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| TEM - FEI Tecnai T20 LaB6 | 203 | Surface analysis & TEM | Ludvig de Knoop | I | FEI | Tecnai T20 LaB6 |
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| TEM - FEI Titan 80-300 | 202 | Surface analysis & TEM | Ludvig de Knoop | L | FEI | Titan 80-300 |
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| TEM - JEOL NeoARM200F - Mono 40-200 | 204 | Surface analysis & TEM | Stefan Gustafsson | M | JEOL | ARM 200F Mono |
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| TOF-SIMS - IONTOF TOF-SIMS 5 | 307 | Mass spectrometry | Katarina Logg | N | IONTOF | TOF.SIMS 5 |
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| XRD - Bruker D8 Advance | 303 | X-ray techniques | Michal Strach | D | Bruker | D8 Advance |
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| XRD - Bruker D8 Discover | 304 | X-ray techniques | Michal Strach | F | Bruker | D8 Discover |